Titanium silicide is dark gray square crystals, which is available in powder and targets. It is a kind of metal silicides. Titanium metal and silicon metal are raw materials. It owns high conductivity and high temperature stability. There are two production methods, physical vapor deposition (PVD) and chemical vapor deposition (CVD).
|CAS No.:12039-83-7||EINECS No.:234-902-2||Molecular Formula:TiSi2||Molecular Weight:104.07|
|Melting Point:1500℃||Density:4.0||Moh’s Hardness:4~5||Electrical Resistivity:123|